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www.edwardsvacuum
APG100 Active Pirani Gauge
Description
Item Number APG100 - XM NW16D026-01-000APG100 - XM NW25D026-02-000APG100 - XLC NW16D026-03-000APG100 - XLC NW25
D026-04-000
Instruction Manual
D026-01-880 Iss B
Jan 09
Graphic
Introduction
Scope and definitions
This manual provides installation, operation and maintenance instructions for the Edwards APG100 Active Pirani Gauge. You must use the APG100 as specified in this manual.
Read this manual before you install and operate the APG100.Important safety information is highlighted as WARNING and CAUTION instructions; you must obey these instructions. The use of WARNINGS and CAUTIONS is defined below.
The following symbols appear on the APG100:
Edwards offer European customers a recycling service.
CAUTION
Cautions are given where failure to observe the instruction could result in damage to the equipment, associated equipment and
process.
Description
The APG100 is a Pirani gauge which measures vacuum pressures in the range 10-4
mbar to 1000  mbar.  It operates using the principle of thermal conductivity in which the rate of heat loss from a heated filament is dependent on the pressure of gas surrounding the filament.The APG100 is available in two versions: the 'M' version can measure pressure down to 10-3 mbar and is suitable for general applications;the 'LC' version can measure pressure down to 10-4 mbar and is also suitable for use in corrosive applications.
A general view of the gauge is shown in Figure 1.  The gauge features a detachable tube which allows a replacement to be fitted in the event of contamination or failure of the filament.  There are two push-b
utton switches on the top of the gauge.  The switch labelled "CAL" is used for atmosphere and vacuum calibration and the switch labelled "S/P" is used to adjust the set-point threshold.
1.Electrical connector
2.Set-point button
3.Cal button
4.Status LED
5.Electronics housing
6.Vacuum flange
Figure 1 - General view of the APG100
T echnical Data
Mechanical data
Dimensions Refer to Figure 2Mass:
NW16 versions 85 g NW25 versions 100 g Internal volume of tube    5 cm 3Enclosure rating
IP40
Performance, operating and storage conditions
Measurement range
APG100-XM 10-3 to 1000 mbar APG100-XLC 10-4 to 1000 mbar
Accuracy
APG100-XM typically ± 15 % at < 100 mbar APG100-XLC typically ± 15 % at < 10 mbar Ambient temperature
Operating    5 to 60 °C Storage
-30 to +70 °C
Bakeout temperature 150 °C (with electronics housing removed)
Humidity
80 % RH up to 31 °C decreasing linearly to 50 % RH at 40 °C and above
Maximum altitude
3000 m (indoor use only)Maximum internal pressure 10 bar absolute (9 bar gauge)Filament temperature
100 °C  above ambient
Electrical data
Electrical supply voltage
15 to 30 nominal 13.5 V minimum 32 V maximum Maximum power consumption
1 W Max inrush current 150 mA
Electrical connector FCC68 / RJ45 8-way
Pressure output signal
Range
1.9 to 9.1 V
Error range
output < 1.8 V or output > 9.2 V Min load impedance 10 k ΩMax output current    1 mA
Set-point
Adjustment range    1.8 to 9.2 V Hysteresis
500 mV
Max external load rating 30 , 100 mA Gauge identification resistance
APG100-XM 36 k ΩAPG100-XLC
43 k Ω
Materials exposed to vacuum
Filament
APG100-XM Tungsten / Rhenium APG100-XLC Platinum / Iridium
Tube Stainless Steel 316L & 304L Filter Stainless Steel 316L
Other
Glass, Ni, NiFe, PTFE (APG100-XLC only)Figure 2 - Dimensions (mm)
Installation
Unpack and inspect
Remove all packing materials and protective covers. Check the APG100.If the APG100 is damaged, notify your supplier and carrier in writing within three days: state the Item Number of the gauge together with your order number and your suppliers invoice number. Retain all packing materials for inspection. Do not use the APG100 if it is damaged.
If the APG100 is not to be used immediately, replace the protective covers. Store the APG100 in suitable conditions as described in Technical Data section.
Fit the APG100 to a vacuum system
The APG100 can be mounted in any orientation however the gauge tubes are individually factory calibrated in nitrogen whilst vertical. For correct pressure indication in your chosen gauge orientation, the gauge should be recalibrated at atmospheric pressure. Edwards recommends mounting the gauge tube vertical in order to minimise the build up of process particulates and condensable vapours within the gauge.
For optimum accuracy it is recommended that both the atmosphere and vacuum adjustment is carried out before use.  Refer to the Maintenance section.
To connect the APG100 to your vacuum system:•Use an 'O' ring / centring-ring or Co-Seal to connect an APG100 with an NW16 or NW25 flange to a similar flange on the vacuum system.•
Use a stepped 'O' ring carrier or Co-Seal to connect an APG100 with an NW16 flange to an NW10 flange.
In accordance with good practice, we recommend that your vacuum system has a secure Earth (ground) connection, and that the tube of the APG100 is electrically connected to the vacuum system.
Connect to an Edwards Controller
The APG100 is compatible with the TIC and ADC digital controllers and the AGD  analogue display from Edwards.  The controllers will automatically recognise the gauge and display the measured pressure.To connect to a Edwards controller use a cable which is terminated in suitable connectors.  These cables are available from Edwards.
Connect to your own electrical equipment
A schematic diagram of the recommended electrical connections to the APG100 is shown in Figure 4.  The pins on the electrical connector are used as shown in Table 1.  Refer to the Technical Data section for more detailed specifications.
Figure 3 - RJ45 8-way connector
Table 1 - Pins on the APG100 electrical connector
CAUTION
Do not make any connection to the gauge identification pin (pin 4) as
this may cause the gauge to malfunction.Pin number
Use
12345678
Electrical supply positive
Electrical supply ground (0 V)
Pressure measurement output signal Gauge identification Signal ground
Set-point output signal Remote calibration input Not connected
1.  APG100 electrical connector socket
2.  Cable electrical connector plug
3.  Electrical supply
4.  Voltmeter
5.  d.c. relay (optional)
6.  Back EMF suppression diode (optional)
7.  Remote calibration switch (optional)
Figure 4 - Recommended electrical connections
Do not connect the electrical supply ground (pin 2) to the signal ground (pin 5).  If you do, the APG100 output signal will be inaccurate.
When using the APG100 in an electrically noisy environment you should ensure that your measuring equipment is adequately immune to interference.  All Edwards controllers have adequate immunity.
The set-point output on pin 6 is an active low open-collector transistor suitable for driving relay or control logic.  If you connect a relay you must use a suppression diode, to protect the gauge from transient voltages generated when the relay is switched off,  as shown in Figure 4.
Make a connection to pin 7 if you require remote calibration.  Momentarily (>50ms) connect pin 7 to pin 2 (ground) to automatically adjust the atmosphere or vacuum reading.  Refer to the Maintenance section for the correct procedure.
Operation
Pressure measurement
When the APG100 is connected to a power supply the status LED will turn amber for approximately 2 seconds. The status LED will then turn green if the gauge is operating correctly or red if an error is detected.Refer to the fault finding guide.
If the gauge is connected to a Edwards controller the display will indicate the measured pressure.
If the gauge is connected to a voltmeter convert the voltage (V) to pressure (P) using the following equations:
P = 10(V - 6)P in mbar P = 10(V - 6.125)P in Torr P = 10(V-4)
P in Pa
For example if the measured voltage V = 4 V , then the measured pressure P = 1 x 10-2 mbar.  Refer to Figures 5 and 6.
Figure 5 - Voltage to pressure conversion for APG100-XM
Figure 6 - Voltage to pressure conversion for APG100-XLC
Gas dependency
The APG100 is calibrated for use in nitrogen, and will read correctly with dry air, oxygen and carbon monoxide.  For any other gas type a conversion is required in order to obtain the correct pressure reading.  Figures 7 and 8 show the conversion for 6 common gases: nitrogen,  argon, carbon dioxide, helium, krypton and neon.
If you are using a Edwards TIC controller, the gas calibration data is built into the controller.
Figure 7 - Gas dependency of APG100-XM
Figure 8 - Gas dependency of APG100-XLC
PLEASE CONTACT ANY OF THESE COMPANIES FOR DETAILS OF OTHER SALES AND SERVICE CENTRES IN YOUR AREA.EUROPE/
AMERICAS
UNITED KINGDOM USA HEADQUARTERS EDWARDS EDWARDS
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Fault finding guide
Table 4 - Fault finding information
Symptom Possible cause
Remedy
LED not lit
Incorrect electrical supply voltage.  Supply polarity reversed.
Check electrical supply and connections Pressure reading incorrect
Vacuum leak Leak check vacuum system T ube has drifted and requires adjustment
Perform the atmosphere and vacuum adjustments T ube contaminated
Replace the tube
Gauge indicates calibration error Adjustment has been attempted at an
inappropriate pressure
Repeat the adjustment but make sure that the
pressure is at atmosphere or good vacuum
Wrong type of tube is fitted
Check that correct type of tube is fitted (M or LC)New tube has been fitted
Perform ‘Adjustment for new tube’
T ube has drifted outside permissible limits and can no longer be adjusted
Replace the tube Gauge indicates broken filament
T ube is missing Fit the tube and remove then re-insert the electrical connector Wrong type of tube is fitted
Check that correct type of tube is fitted (M or LC)Filament is broken
Replace the tube
For pressures below 1mbar a simple calibration factor can be used to correct for different gas types. Gas Calibration Factors (GCFs) for common gases are shown in Table 2.
True pressure = GCF x indicated pressure
Table 2 - Gas calibration factors below 1 mbar
Set-point adjustment
Note:
If you use a Edwards Controller the APG100 set-point is not used.
To read the pressure at which the set-point output turns on, push the "S/P" button with an appropriate tool (see Figure 9).  The signal output of the gauge will change to indicate the set-point threshold for three seconds after which the output will return to normal.
Gas GCF He Ne N 2Ar CO 2Kr
1.11.51.01.71.0
2.6
CAUTION
When the ‘S/P’ button is pushed the gauge output will change.  Do not push the ‘S/P’ button to adjust the set-point if the change in
output could cause a malfunction of your system.The set-point has a fixed hysteresis of 500mV.  When the measured pressure falls below the set-point pressure the transistor output changes to ON (closed).  The transistor output will turn OFF when the measured pressure rises to 500mV above the set-point pressure.An external relay connected as shown in Figure 4 will turn on when the pressure falls below the set-point and turn of when the pressure rises to 500 mV above the set-point.
To adjust the set-point threshold push the "S/P" button and hold it down for more than three seconds.  The threshold value will increase steadily.  Release the button when you reach the required value.  To make finer adjustment release the button just before the required value is reached and immediately push the button as many times as required.  Each time you push the button the threshold value will increase by 10mV.  If during adjustment the threshold reaches the maximum value (9.2V) it will jump to the minimum (1.8V) and increase again.
If you do not need to use the set-point or if you require the set-point to be permanently off, you can adjust the threshold to 1.8V.  This will ensure that the set-point does not operate.  The APG100 is shipped
from the factory with the threshold set to 1.8V.
The set-point can also be used to indicate that the gauge is operating correctly.  If you adjust the threshold to 9.2V then the set-point output will be ON as long as the gauge is operating correctly and will turn OFF if an error is detected.
Figure 9 - Adjusting set-point
Error monitoring
If an error occurs during operation of the APG100 then the status LED will turn red to indicate an error and the output voltage will change to indicate the error condition.  Error voltages are shown in Table 3 below.The set-point will be disabled as soon as an error is detected.  Refer to the fault finding guide.
If you use a Edwards Controller then an error message will be shown on the display.
Table 3 - Error indication
Bakeout
In some UHV applications it is desirable to bake the vacuum system components in order to achieve a lower base pressure.  The tube of the APG100 can be baked to 150°C, but the electronics housing must be removed.•Referring to Figure 12,  remove the electronics housing.•Bake the tube on your vacuum system.  Do not exceed 150°C.•
Allow the tube to cool before refitting the electronics housing.
Error condition Output (V)TIC Display ADC Display AGC Display Broken filament or tube removed 9.5
Filament Fail
Err 25
Err E
Calibration error
9.6Cal Error Err 26Err F
Maintenance
Atmosphere and vacuum adjustment
Every APG100 is individually adjusted before shipment, however thermal conductivity gauges can drift with time or as contamination builds up on the filament.  Use the procedures outlined below to adjust the atmosphere and vacuum settings of the gauge.  The frequency with which they should be repeated will vary depending on the level and nature of the contamination associated with the process.
Figure 10 - Adjustment of APG100
Atmosphere adjustment
1.Switch on the power supply to the APG100 and allow it to operate at atmospheric pressure for at least 10 minutes. Ensure that the green status LED is lit.
2.Press the 'CAL' button. The status LED will flash and the gauge will automatically adjust to read atmospheric pressure.  Do not hold the ‘CAL’ button down for longer than 5 seconds (see ‘Adjustment for new tube’ below).
Vacuum adjustment
1.Reduce the system pressure to 1 x 10-4 mbar (or below) for the APG100-XM, or to 1x10-5 mbar (or below) for the APG100-XLC.
2.Allow the gauge to operate for at least 10 minutes.
3.
Press the 'CAL' button. The status LED will flash and the gauge will automatically adjust to read vacuum.
Remote adjustment
The atmosphere and vacuum adjustments can be performed remotely using a switch connected as shown in Figure 4.  Follow the procedure described above, but momentarily close the remote switch instead of using the ‘CAL’ button on the gauge.  Edwards controllers use this feature so that the atmosphere and vacuum readings can be automatically adjusted from the front panel of the controller.
Adjustment for new tube
If a replacement tube is fitted to the gauge it will be necessary to adjust the gauge to match the new tube.  Note that this is not required unless a new
tube is fitted, and it is always necessary to perform a vacuum adjustment afterwards.
1.
Switch on the power supply to the APG100.
2.With the gauge at atmospheric pressure, press the 'CAL' button and hold it down for longer than 5seconds.  The status LED will begin to flash red / green alternately and the gauge will automatically adjust to match the new tube.  This may take several seconds.
3.Allow the gauge to operate at atmospheric pressure for at least 10minutes and then repeat step 2.
4.It is now necessary to perform the vacuum adjustment as described above.
Replace the filter
The filter that is fitted inside the vacuum flange of the gauge provides protection from process contamination.  With use the filter can become dirty or blocked, and it will be necessary to replace the filter.Refer to Figure 11 and follow this procedure to replace the filter.1.Unplug the electrical cable, vent the vacuum system to atmospheric pressure and remove the gauge from the vacuum system.2.Use circlip pliers to remove the retaining circlip.  T ake care not to damage the sealing surface of the vacuum flange or the inside of the gauge tube.3.Remove and discard the old filter.
4.Refit the filter into the gauge tube and refit the circlip.
CAUTION
Do not clean the interior of the gauge tube as you can damage the
filament.1.  Gauge tube 2.  Filter 3.  Circlip
Figure 11 - Replacement of filter
Replace the gauge tube
If the gauge tube has become severely contaminated so that atmosphere or vacuum adjustment cannot be achieved, or if the filament is broken,then you can fit a replacement tube to the gauge.
Refer to Figure 12 and follow this procedure to replace the gauge tube.1.Unplug the electrical cable, vent the vacuum system to atmospheric pressure and remove the gauge from the vacuum system.2.Pull the retaining clip from side of gauge.3.Pull the tube from the electronics housing.
4.Fit the replacement tube into electronics housing, noting the correct alignment.
5.Refit the retaining clip.
Whenever a new tube is fitted it is necessary to adjust the gauge to match the new tube.  Refer to ‘Adjustment for new tube’ above.
1.Electronic housing
2.Retaining clip
3.
Gauge tube
Figure 12 - Replacement of gauge tube
For printable copies of the HS2 form below please contact your supplier or Edwards.
Return of Edwards Equipment - Procedure
INTRODUCTION
Before returning your equipment, you must warn Edwards if substances you used (and produced) in the equipment can be hazardous.  This information is fundamental to the safety of our Service Centre employees and will determine the procedures employed to service your equipment.Complete the Declaration (HS2) and send it to Edwards before you dispatch the equipment.  It is important to note th
at this declaration is for Edwards internal use only, and has no relationship to local, national or international transportation safety or environmental requirements. As the person offering the equipment for shipment, it is your responsibility to ensure compliance with applicable laws. GUIDELINES
•Equipment is 'uncontaminated ' if it has not been used, or if it has only been used with substances that are not hazardous.  Y our equipment is 'contaminated ' if it has been used with any substances classified as hazardous under EU Directive 67/548/EEC (as amended)or OSHA Occupational Safety (29 CFR 1910).•
If your equipment has been used with radioactive substances,biological or infectious agents, mercury, polychlorinated biphenyls (PCB’s), dioxins or sodium azide, you must decontaminate it before you return it to Edwards.  Y ou must send independent proof of decontamination (for example a certificate of analysis) to Edwards with the Declaration (HS2).  Phone Edwards for advice.
•
If your equipment is contaminated, you must either:
•Remove all traces of contamination (to the satisfaction of laws governing the transportation of dangerous/hazardous substances).
•Or, properly classify the hazard, mark, manifest and ship the equipment in accordance with applicable laws governing the shipment of hazardous materials.
Note: Some contaminated equipment may not be suitable for airfreight.
PROCEDURE
1.Contact Edwards and obtain a Return Authorisation Number for your equipment.
2.Complete the Return of Edwards Equipment Declaration (HS2).
3.If the equipment is contaminated, you must contact your transporter to ensure that you properly classify the hazard, mark,manifest and ship the equipment, in accordance with applicable laws governing the shipment of contaminated/hazardous materials.As the person offering the equipment for shipment, it is your responsibility to ensure compliance with applicable law.
Note: Equipment contaminated with some hazardous materials, such as semiconductor by-products, may not be suitable for airfreight - contact your transporter for advice.
4.Remove all traces of hazardous gases: pass an inert gas through the equipment and any accessories that will be returned to Edwards.  Where possible, drain all fluids and lubricants from the equipment and its accessories.
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5.Seal up all of the equipment's inlets and outlets (including those where accessories were attached) with blanking flanges or, for uncontaminated product, with heavy gauge tape.
6.Seal equipment in a thick polythene/polyethylene bag or sheet.
7.If the equipment is large, strap the equipment and its accessories to a wooden pallet. If the equipment is too small to be strapped to a pallet, pack it in a suitable strong box.
8.Fax or post a copy of the D eclaration (HS2) to Edwards.  The Declaration must arrive before the equipment.
9.Give a copy of the D eclaration (HS2) to the transporter.  Y ou must tell your transporter if the equipment is contaminated.
10.Seal the original D eclaration in a suitable envelope: attach the envelope securely to the outside of  the equipment package, in a clear weatherproof bag.
WRITE YOU R RETU RN AU THORISATION NU MBER CLEARLY ON THE OUTSIDE OF THE ENVELOPE OR ON THE OUTSIDE OF THE EQUIPMENT PACKAGE.
Order spare parts and accessories from your nearest Edwards company or distributor. When you order, please state for each part required:•Model and Item Number of your equipment •Serial number (if any)
•Item Number and description of part
Spares
Spare
Item Number Replacement electronics housing
APG100-XM D026-01-800APG100-XLC D026-03-800Replacement tube
APG100-XM NW16D026-01-801APG100-XM NW25D026-02-801APG100-XLC NW16D026-03-801APG100-XLC NW25D026-04-801Replacement Filter Kit
D026-01-805
Accessories
The cables for use with the APG100 are as follows.  These cables are supplied with 8-way male electrical connectors on both ends.Cable length Item Number 0.5 m 18 inches D400-01-0051 m    3 feet D400-01-0103 m 10 feet D400-01-0305 m 15 feet D400-01-05010 m 30 feet D400-01-10015 m 50 feet D400-01-15025 m 80 feet D400-01-25050 m 150 feet D400-01-500100 m
325 feet
D400-01-999
Calibration service
A calibration service is available for all Edwards gauges.  Calibration is by comparison with reference gauges, traceable to National Standards.Contact Edwards for details.
Storage and Disposal
Dispose of the APG100 and any components safely in accordance with all local and national safety and environmental requirements.
Alternatively, you may be able to recycle the APG100 and cables: contact Edwards or your supplier for advice (also see below).
The APG100 and associated cables are within the scope of the European D irective on Waste Electrical and Electronic Equipment, 2002/96/EC.Edwards offers European customers a recycling service for the APG100and cables at the end of the product’s life.  Contact Edwards for advice on how to return the APG100 and cables for recycling.
Particular care must be taken if the APG100 has been contaminated with dangerous process substances.
Spares and Accessories
Introduction
Edwards products, spares and accessories are available from Edwards companies in Belgium, Brazil, Canada, France, Germany, Hong Kong, Italy,Japan, Korea, Switzerland, United Kingdom, U.S.A. and a world wide network of distributors. The majority of these centres employ Service Engineers who have undergone comprehensive Edwards training courses.
Form HS1
Return of Edwards Equipment - Declaration You must:
•Know about all of the substances which have been used and produced in the equipment before you complete this Declaration
•Read the Return of Edwards Equipment - Procedure (HS1) before you complete this Declaration
•Contact Edwards to obtain a Return Authorisation Number and to obtain advice if you have any questions
•Send this form to Edwards before you return your equipment
SECTION 1: EQUIPMENT
Equipment/System Name Part Number Serial Number
Has the equipment been used, tested or operated? YES      Go to Section 2
NO      Go to Section 4
IF APPLICABLE:Tool Reference No.Process Failure Date
Serial No. of Replacement Equipment
SECTION 2: SUBSTANCES IN CONTACT WITH EQUIPMENT Are any substances used or produced in the equipment:
•Radioactive, biological or infectious agents, mercury, poly chlorinated biphenyls (PCBs), dioxins or sodium azide? (if YES, see Note 1)
YES        NO
•Hazardous to human health and safety?              YES        NO
Note 1:  Edwards will not accept delivery of any equipment that is contaminated with radioactive substances, biological/infectious agents,mercury, PCB’s, dioxins or sodium azide, unless you:•Decontaminate the equipment •Provide proof of decontamination
YOU  MU ST CONTACT EDWARDS FOR ADVICE BEFORE YOU RETURN SUCH EQUIPMENT
Form HS2
Return Authorisation No;:SECTION 3: LIST OF SUBSTANCES IN CONTACT WITH EQUIPMENT              Substance name                              Chemical Symbol
Precautions required                  Actions required after a spill,  (e.g. use protective gloves, etc.)                    leak or exposure
SECTION 4: RETURN INFORMATION
Reason for return and symptoms of malfunction If you have a warranty claim:
•who did you buy the equipment from?•give the supplier’s invoice number
SECTION 5: DECLARATION
Print your name:Print your job title:Print your organisation:Print your address:Telephone number:
Date of equipment delivery:
I have made reasonable enquiry and I have supplied accurate information in this D eclaration.  I have not withheld any information, and I have followed the Return of Edwards Equipment - Procedure (HS1).Signed:                                                      Date:
Note:  Please print out this form, sign it and return the signed form as hard copy.
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