专利名称：TRANSFER ARM
发明人：KIRIYAMA KENJI,ASAKAWA
TERUO,TOMOYOSHI TSUTOMU 申请号：JP6980791
申请日：19910402
公开号：JPH04305956A
公开日：
19921028pulleys
专利内容由知识产权出版社提供
摘要：PURPOSE:To provide a transfer arm which makes it possible to protect service lines, such as capable and tube from interference with an outside body or twisting induced by the movement of an arm and prevent the generation of cutdown service lines and dust and dirt. CONSTITUTION:An arm 3 comprises a first arm 3a, a second arm 3b, and a third arm 3c. A base 2 and the connection section of these arms are composed of a first joint 4a, a second joint 4b and a third joint 4c which can be rotated respectively. There is installed a holding section 6 which holds a semiconductor wafer 5 on the third arm 3c at the tip. The arm is designed so that the semiconductor wafer 5 may be transferred in parallel along the longitudinal direction of the arm 3. There are installed a first pulley 7, a second pulley 8, and a third pulley 8 on the first joint 4a, the second joint 4b. An evacuating tube 10, which serves as a service line, is installed in such a fashion that it may be wound around the pulleys.
申请人：TOKYO ELECTRON LTD
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