专利名称：SURFACE ACOUSTIC WAVE SENSOR COATING
发明人：SUN, Yin
申请号：US2017/033556
申请日：20170519
公开号：WO2017/201416A1
公开日：
20171123
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专利内容由知识产权出版社提供
专利附图：
摘要：A surface acoustic wave sensor in which instrument drift resulting from accumulated surface contamination is minimized. The sensor includes a piezeoelectric substrate defined by an outer surface and a plurality of interdigitated electrodes mounted thereon. The electrodes are defined by one or more exposed portions and an unexposed portion abutting the outer surface of the piezoelectric substrate. An inert coating layer on the outer surface of the piezoelectric substrate and the exposed portions of the electrodes is provided, and can be a perfluoro-silane type compound, a perfluoro-trichloro-silane type compound, a perfluoro-acrylate type compound, polytetrafluoroethylene, or heptadecafluorodecyltrimethoxysilane.
申请人：PULMOSTICS LIMITED
地址：70 Sir Rogerson's Quay Dublin, D02 R296 IE
国籍：IE
代理人：STETINA Kit M.
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