SEMI F20-0706E
SPECIFICATION FOR 316L STAINLESS STEEL BAR, FORGINGS, EXTRUDED SHAPES, PLATE, AND TUBING FOR COMPONENTS USED IN GENERAL PURPOSE, HIGH PURITY AND ULTRA-HIGH PURITY SEMICONDUCTOR MANUFACTURING APPLICATIONS This standard was technically approved by the global Gases Committee.  This edition was approved for
publication by the global Audits and Reviews Subcommittee on May 16, 2006.  It was available at
in June 2006 and on CD-ROM in July 2006.  Originally published 1995; previously published
March 2005.
E This standard was editorially modified in October 2006 to correct a section numbering error.
Changes were made to Appendix 1, § A1-2.
1  Purpose
1.1 The purpose of this specification is to define the metallurgical cleanliness requirements and material composition of 316L stainless steel required for use in the manufacture of components for general purpose, high purity, and ultra-high purity chemical (gas or liquid) distribution systems.
2  Scope
2.1 This specification defines the requirements for 316L stainless steel bar, forgings, and extruded shapes as specified in ASTM A 276, plate stock as specified in ASTM A 240, and tubing as specified in ASTM A 269 and ASTM A 632, for use in the manufacture of components used in general purpose and high purity chemical (gas or liquid) distribution systems in semiconductor manufacturing facilities.
NOTICE: This standard does not purport to address safety issues, if any, associated with its use.  It is the responsibility of the users of this standard to establish appropriate safety and health practices and determine the applicability of regulatory or other limitations prior to use.
3  Referenced Standards and Documents
3.1 ASTM Standards1
A182/A 182M — Specification for Forged or Rolled Alloy-Steel Pipe Flanges, Forged Fittings, and Valves and Parts for High Temperature Service
A 240/A 240M—Specification for Heat-Resisting Chromium and Chromium-Nickel Stainless Steel Plate, Sheet, and Strip for Pressure Vessels
A 262 — Practices for Determining Susceptibility to Intergranular Attack in Austenitic Stainless Steels
A 269 — Standard Specification for Seamless and Welded Austenitic Stainless Steel Tubing for General Service
A 276 — Specification for Stainless and Heat-Resisting Steel Bars and Shapes
A 479/A 479M— Specification for Stainless and Heat Resisting Steel Bars and Shapes for Use in Boilers and Other Pressure Vessels
A 480/A 480M— Specification for General Requirements for Flat-Rolled Stainless and Heat-Resisting Steel Plate, Sheet and Strip
A 484/A 484M—Specification for General Requirements for Stainless and Heat-Resisting Wrought Steel Products (Except Wire)
A 632— Standard Specification for Seamless and Welded Austenitic Stainless Steel Tubing (Small-Diameter) for General Service
A 751 — Test Methods, Practices and Terminology for Chemical Analysis of Steel Products
E 45 — Recommended Practice for Determining the Inclusion Content of Steel
E 112 — Test Methods for Determining Average Grain Size
1 American Society for Testing and Materials, 100 Barr Harbor Drive, West Conshohoken, PA 19428-2959, USA. Telephone: 610.832.9585, Fax: 610.832.9555, Website: 
NOTICE: Unless otherwise indicated, all documents cited shall be the latest published versions.
4  Terminology
editorially4.1 Definitions
4.1.1 inclusion — indigenous or foreign material within the metal, usually referring to non-metallic compound particles such as oxides, alumina, sulfides or silicates.
4.1.2 Grades
4.1.2.1 General Purpose (GP) Grade — For components intended for use in chemical distribution systems of semiconductor manufacturing facilities that do not have stringent cleanliness requirements.  Examples are clean dry air and vacuum lines.
4.1.2.2 High Purity (HP) Grade — For components intended for use in high performance capability chemical distribution systems of semiconductor manufacturing facilities.
4.1.2.3 Ultra High Purity (UHP) Grade — For components intended for use in advanced chemical distribution systems of semiconductor manufacturing facilities in which optimum resistance to corrosion and contamination in critical process chemicals are required.
5  Ordering Information
5.1 Orders for bar, forgings, extruded shapes, plate, or tubular products under this specification shall include:
5.1.1 Grade — General purpose, high purity, or ultra-high purity,
5.1.2 Quantity (kilograms, pounds, meters, inches, or feet),
5.1.3 Cross section description (round, square, hex, etc. or detailed drawing),
5.1.4 Size (nominal diameter or shape dimensions for other than those identified with an extrusion drawing),
5.1.5 Wall thickness (for tubing),
5.1.6 Length (specific or random),
5.1.7 Reference to this specification number, and
5.1.8 Any special and/or supplementary requirements such as melting and refining processes.
6  Requirements
6.1 General
6.1.1 Bar stock, forgings, or extruded shapes furnished under this specification shall conform to the requirements of ASTM A 182/A 182M, ASTM A 276, ASTM A 479/A 479M, or ASTM A 484/A 484M, and the additional requirements of this specification.
6.1.2 Plate stock furnished under this specification shall conform to the requirements of ASTM A 240 or
A 480/A 480M, and the additional requirements of this specification.
6.1.3 Tubing furnished under this specification shall conform to the requirements of ASTM A 269 or A 632, and the additional requirements of this specification.
6.1.4 Where the requirements of this specification conflict with referenced specifications, the requirements of this specification take precedence.
6.2 Manufacture
6.2.1 The stainless steel billet material used for processing shall be manufactured by such melting, casting and refining processes required to conform to the composition and metallurgical requirements of this specification.
6.2.2 The annealing temperature used to achieve the grain size requirements of ¶ 6.4.1 shall be 982o C (1800o F) minimum.
6.3 Composition
6.3.1 Material shall be type 316L stainless steel, as specified in Table I of ASTM A 182/A 182M, ASTM A 240, ASTM A 269, ASTM A 276, ASTM A 479/A 479M, or ASTM A 632, except where otherwise specified herein.
6.3.2 General purpose grade material shall have a composition per ASTM A 269 and ASTM A 632, with the exception of limited Sulfur 0.012% maximum.
6.3.3 Additional composition requirements for the high purity and ultra-high purity grades are shown in Table 1.
Table 1 Additional Composition Requirements
Element Range – Wt %
Carbon 0.030
Max
Sulfur 0.010
Max
Manganese 1.5
Max
Copper 0.30
Max#1
Niobium 0.05
Max
Aluminum 0.01
Max
Calcium 0.02
Max
Titanium 0.02
Max
Selenium 0.02
Max
#1  Agreement may be reached between the supplier and the customer to accept a higher
level of copper.
6.3.4 Effects of Sulfur content on welding are significant, as discussed in Appendix 1.
6.3.5 Effects of Copper content on welding are discussed in Appendix 2.
6.3.6 No deviations in material composition from the minimum or maximum values specified in the appropriate ASTM document or herein shall be allowed without approval by the purchaser.
6.4 Metallurgy
6.4.1 Grain size per ASTM E 112 shall be 5 or finer for hot or cold finished product and tubing of nominal size 3 inches in diameter and smaller, and 3 or finer for material stock greater than 3 inches.  These requirements may be modified as agreed upon between supplier and user.  Grain size on flats and squares shall be as agreed upon by the supplier and the user.
6.4.2 The inclusion content of the material shall be determined from representative samples of the material heat in accordance with ASTM E 45, Method A, but with ratings based on Plate III.  Maximum allowable JK ratings at the billet stage are shown in Table 2.
Table 2 Maximum JK Inclusion Ratings
General Purpose
Grade High Purity Grade Ultra-High Purity
Grade
Type
Thin Heavy Thin Heavy Thin Heavy
A 2.5 1.0 2.0 1.0 1.5 1.0
B 2.5 1.0 2.0 1.0 1.0 1.0
C 2.5 1.0 2.0 1.0 1.0 1.0
D 2.5 1.0 2.0 1.0 1.0 1.0
6.4.3 Material shall meet the intergranular corrosion test specified in Practice E of ASTM A 262.  This requirement shall apply in the sensitized condition (1 hour at 677°C [1250°F]).
7  Certification
7.1 A certified copy of the material test report shall be provided at the time of shipment.  The material test report shall include:
7.1.1 The results of the composition analysis, to include all elements required to be controlled by this specification, made in accordance with ASTM A 751.
7.1.2 Grain size.
7.1.3 JK ratings of inclusion content.
7.1.4 Mechanical properties.
8  Product Labeling
8.1 Material shall be identified with the following information: 8.1.1 Manufacturer’s name,
8.1.2 Purchaser’s name and order number,
8.1.3 ASTM specification number(s),
8.1.4 This specification number,
8.1.5 Heat number, and
8.1.6 Material type (i.e., 316L).
APPENDIX 1
THE EFFECTS OF SULFUR ON GTA WELDING OF 316L STAINLESS
STEEL
NOTICE:  The material in this appendix is an official part of SEMI F20 and was approved by full letter ballot procedures.
A1-1  Effects of Sulfur
A1-1.1 AISI Type 316L austenitic stainless steel is the preferred material for components of gas supply systems for semiconductor fabrication. The composition of 316L specified in Table I of ASTM A 182/A 182M, ASTM A 240,
ASTM A 269, ASTM A 276, ASTM A 479/A 479M, or ASTM A 632, has a maximum of 0.030 percent Sulfur;
however several properties affecting the manufacture and applications of 316L can vary significantly over this range
of Sulfur content.  Therefore a lower Sulfur maximum is specified in SEMI F20, as listed in ¶ 6.3.2 and Table 1 of
¶ 6.3.3.
A1-1.2 Sulfur has a very low solubility in austenitic stainless steels, thus in these alloys it exists as discrete
inclusions of Manganese Sulfide, with some solubility for Chromium as well as other trace elements. These
inclusions can initiate pits and other defects on electropolished surfaces, increasing in number with increasing Sulfur
content.
A1-1.3 The Manganese Sulfide inclusions improve the machinability of stainless steel; compositions intended for
machining have Sulfur compositions near the 0.030 percent maximum, whereas stainless steels with very low Sulfur
levels require lower feeds and speeds and will cause reduced tool life during machining.
A1-1.4 Sulfur also strongly affects welding of stainless steel; variation of Sulfur from very low contents to the
maximum permitted can increase weld bead penetration by approximately a factor of two for similar weld parameters.
A1-1.5 The effects of Sulfur are summarized in Table A1-1.
A1-2  Welding Effects of Sulfur
A1-2.1 Two effects are observed on welding with variations in Sulfur level:
A1-2.1.1 As Sulfur is reduced the heat input required for full penetration increases.
A1-2.1.2 As Sulfur is reduced below approximately 0.005 percent there is a marked change in weld pool dynamics,
causing the weld pool to become wider and shallower2.
Table A1-1 – Effects of Sulfur on Austenitic Stainless Steels
As Sulfur increases from zero to the 0.030% maximum permitted:
Effects Results Machinability improves. Lower machining costs for machined parts.
Inclusion density increases. More pits, stringers, other defects on surface.
Decreased corrosion resistance, particularly on end grains.
Welding penetration increases. Weld settings must be reset when changing lots.
Problems welding materials with dissimilar Sulfur contents.
Solidification temperature range increases. Increased segregation in weld.
Rougher weld bead surface.
2  K. Watanabe and K. Masuda, Effects of Residual and Micro-Alloying Elements on Welding of Stainless Steel; Part 1: Effects on weld pool
behavior by GTAW, IIW Doc. IX-1837-96, International Institute of Welding, 1996, 17 pp. (Literature review).

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