专利名称：Split reaction mass it is deflection plate supportreaction mass
发明人：ダニエル エヌ ガルバート,マーク ウィリアムズ申请号：JP2004333679
申请日：20041117
公开号：JP4222998B2
公开日：
20090212
专利内容由知识产权出版社提供
摘要：An apparatus for stabilizing a scanning system during lithographic processing comprises a baseframe, a reaction mass, and a pair of flexures connecting the reaction mass to the baseframe. The apparatus also comprises a second reaction mass and a second pair of flexures, placed in parallel to the first to form a split reaction mass system. The apparatus is configured such that, upon acceleration of a stage movably coupled to the reaction masses, a resulting load is split substantially evenly between the first and second reaction masses. Also upon acceleration of the stage, the first reaction mass rotates in the opposite direction of the second reaction mass, resulting in a net moment reaction on the baseframe of approximately zero.
申请人：エーエスエムエル ホールディング エヌ．ブイ．
地址：オランダ国 ヴェルトホーフェン ５５０４ ディー アール，デ ラン ６５０１
国籍：NL
代理人：森下 賢樹
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