专利名称：Tool produced by a plasma-activated CVD process
发明人：Hendrikus van den Berg,Udo Konig,Ralf Tabersky,Josef Blum
申请号：US07/797113
申请日：19911121
公开号：US05223337A
公开日：
19930629
专利内容由知识产权出版社提供
摘要：A tool having an extended service lift and including a hard metal body, and at least one surface layer composed of at least one hard substance selected from the group consisting of carbides, nitrides, and carbonitrides of titanium and zirconium, and having a chlorine content ranging from a finite amount up to 4 mass percent, the tool being produced by plasma-activated CVD process including: a. positioning the hard metal body in a CVD chamber having means for supplying direct voltage thereto, the hard metal body being connected to the direct voltage supplying means as a cathode thereof, b. introducing into the CVD chamber a reactive gas mixture including a nitrogen-containing substance, a carbon-containing substance, and at least one compound containing at least one of titanium and zirconium, and c. exciting plasma formation at the hard metal body and coating same by chemical vapor deposition by applying a pulsed direct voltage and a residual direct voltage thereto, the residual direct voltage having a magnitude which is at least equal to the lowest ionization potential of any gas in the reactive gas mixture but does not exceed 50% of the maximum value of the pulsed direct voltage.
申请人：FRIED. KRUPP GMBH
reactive substance
代理机构：Spencer, Frank & Schneider 更多信息请下载全文后查看

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