专利名称：Metal oxide films
发明人：Robert David King,Robert Hiscutt 申请号：US05/220899
申请日：19720126
reactive metal公开号：US04006070A
公开日：
19770201
专利内容由知识产权出版社提供
摘要：A substantially uniform, transparent, electrically conducting, metal oxide film (e.g. of indium/tin oxide) can be deposited on to a substrate such as glass of large lateral dimensions, e.g. a windscreen for an aircraft or a land vehicle, by low-pressure reactive sputtering from a cathode of the metal, using an atmosphere of oxygen and another gas or gases (preferably an inert gas) at reduced pressure, by providing access for the sputtering atmosphere to penetrate into the whole of the working space between the cathode and the substrate so as to maintain a substantial degree of uniformity in the oxygen concentration in the working space. Access for the atmosphere may be provided by means of passages extending through the cathode assembly, by dividing the cathode assembly into parallel strips separated by gaps, and the atmosphere may be supplied direct to the working space through such gaps. Relative movement is effected between the cathode assembly and the substrate, e.g. by reciprocating the parallel strips of the divided cathode in the direction perpendicular to their length.
申请人：TRIPLEX SAFETY GLASS COMPANY LIMITED
代理机构：Sughrue, Rothwell, Mion, Zinn & Macpeak
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