专利名称：PURGED HEATER-SUSCEPTOR FOR AN ALD/CVD REACTOR
reactor4发明人：DOERING, Ken,KUBANI, Mike,KIM, Gi, Youl,FOOTE, David
申请号：EP04710303.1
申请日：20040211
公开号：EP1593147A1
公开日：
20051109
专利内容由知识产权出版社提供
摘要：A heater assembly for an ALD or CVD reactor provides protection for an electrical conductor associated with a heating element by using a purge gas to isolate the conductor from the corrosive environment of the reactor chamber. The purge gas is introduced into a sleeve surrounding the conductor and from there is allowed to leak into the reactor chamber to be pumped out with the process gasses. This arrangement avoids the need for airtight seals at the junction of the sleeve and the heating element easing manufacturing requirements and potentially reducing component costs.
申请人：GENUS, INC.
地址：11396 Karlstad Drive Sunnyvale, CA 94086 US
国籍：US
代理机构：Setna, Rohan P.
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