专利名称：APPARATUS AND METHOD FOR
DEPOSITION OF FUNCTIONAL COATINGS 发明人：HERBERT, Anthony,O'NEILL,
Liam,JAROSZYNSKA-WOLINSKA, Justyna
申请号：EP2010001703
申请日：20100318
公开号：WO10/105829P1
公开日：
20100923
专利内容由知识产权出版社提供
deposition
摘要：A method for deposition of functional coatings comprises igniting a non-thermal equilibrium plasma within an ambient pressure plasma chamber having a gas supply inlet and a plasma outlet; and providing a substrate to be coated adjacent to the plasma outlet. A gas phase pre-cursor monomer is provided to the plasma chamber through the gas inlet. A specific energy is coupled into the plasma during the flow of the pre-cursor through the chamber sufficient to disassociate at least the weakest intra-molecular bond required to allow polymerisation of the pre-cursor when deposited on a surface of the substrate adjacent the plasma outlet, the coupled specific energy not exceeding a specific energy required break intra-molecular bonds required for the functionality of the monomer molecule.
申请人：HERBERT, Anthony,O'NEILL, Liam,JAROSZYNSKA-WOLINSKA, Justyna
地址：IE,IE,PL
国籍：IE,IE,PL
代理机构：BOYCE, Conor
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