专利名称：Line-of-sight deposition method 发明人：James W. Patten,Edwin D.
McClanahan,Michael A. Bayne
申请号：US06/140948
申请日：19800416
公开号：US04305801A
公开日：
19811215
专利内容由知识产权出版社提供
摘要：A line-of-sight method of depositing a film having substantially 100% of theoretical density on a substrate. A pressure vessel contains a target source having a surface thereof capable of emitting particles therefrom and a substrate with the source surface and the substrate surface positioned such that the source surface is substantially parallel to the direction of the particles impinging upon the substrate surface, the distance between the most remote portion of the substrate surface receiving the particles and the source surface emitting the particles in a direction parallel to the substrate surface being relatively small. The pressure in the vessel is maintained less than about 5 microns to prevent scattering and permit line-of-sight deposition. By this method the angles of incidence of the particles impinging upon the substrate surface are in the range of from about 45° to 90° even when the target surface area is greatly expanded to increase the deposition rate.
deposition申请人：THE UNITED STATES OF AMERICA AS REPRESENTED BY THE UNITED STATES DEPARTMENT OF ENERGY
代理人：Hugh W. Glenn,Robert J. Fisher,Richard G. Besha
更多信息请下载全文后查看

版权声明：本站内容均来自互联网，仅供演示用，请勿用于商业和其他非法用途。如果侵犯了您的权益请与我们联系QQ:729038198，我们将在24小时内删除。