150MM WAFER SHIPPING AND
HANDLING PRODUCTS
The widest selection of150mm wafer shipping
and handling products available
Table of Contents
Multiple Wafer Shipping Boxes (2)
Ultrapak®Series (2)
Single Wafer Shipping Boxes and Trays (3)
H93Series Shipping Box (3)
Solopak®Series Shipping Box (4)
H22Series Shipping Box (5)
H20Series Tray (5)
Transport Wafer Carriers (6)
194/196Series (6)
182Series (6)
Process Wafer Carriers (7)
194Series (7)
190Series (7)
<8Storage Boxes. (9)
E160Series (9)
E124Series (9)
E90Series (9)
E206Series (9)
H3150Series (10)
Options and Accessories (11)
Wafer Carrier Handles (11)
Storage Box Accessories (12)
Identification Options (12)
replaceableMaterial Information (13)
Other Products (13)
Warranty (14)
ENTEGRIS,INC.1
150MM WAFER SHIPPING AND HANDLING PRODUCTS
150MM WAFER SHIPPING AND HANDLING PRODUCTS
Multiple Wafer Shipping Boxes
Ultrapak®Series
•Individual horizontal cantilever springs limit wafer
rotation to reduce particle contamination and also
secure the wafers in the cassette to safeguard
against breakage
•Ultrapure polypropylene materials provide a clean
shipping environment and assure low levels of
condensable inorganics
•Horizontal and vertical robotic pickup flanges on
the cassette allow convenient handling
•Center notch track alignment and“H”bar ensure
accurate equipment interoperability both vertically
Ultrapak
and horizontally
Ordering Information
Part Number Description Material
H9150-0037Assembly High-purity polypropylene
H9150-0038Assembly,cleaned High-purity polypropylene
2ENTEGRIS,INC.
ENTEGRIS,INC.3150MM WAFER SHIPPING AND HANDLING PRODUCTS
Single Wafer Shipping Boxes and Trays
H93Series Shipping Box
•For shipping and storage applications
•Holds one wafer face down contacting only the
wafer’s edges
•Replaceable cushions securely retain the wafer
to minimize particle generation
•Single latch provides secure closure and easy
opening
•Tweezer slots conveniently located for easy
wafer handling
•Large top surface provides a convenient space
for labeling
•Stackable shipping boxes allow efficient use of
storage space •Pin-in-socket hinges allow the shipper to
be opened horizontally,providing stability for
wafer handling
•Clear polycarbonate material allows visual
inspection without opening
•Optional STAT-PRO ®500black conductive
polycarbonate material provides static protection
•Overall size:175mm ×160mm ×20mm (6.9˝×6.3˝×0.8˝)Ordering Information
Part Number Description Material
H9150-0019
Assembly High-purity polypropylene H9150-0018Assembly,cleaned High-purity polypropylene
H93
150MM WAFER SHIPPING AND HANDLING PRODUCTS
Solopak®Series Shipping Box
•For shipping and storage applications
•Holds one wafer face down or face up in a conical
pocket contacting only the wafer’s edges
•Flat or notch locators prevent wafer rotation to
minimize particle generation
•Dual latch provides secure closure and easy opening
•Tweezer slots conveniently located for easy
wafer handling
•Large top surface provides a convenient space
for labeling
•Stackable shipping boxes allow efficient use of
storage space
•Pin-in-socket hinges allow the shipper to
be opened horizontally,providing stability for
Solopak
wafer handling
•Clear polycarbonate material allows visual inspection
without opening
•Overall size:173mm×162mm×16mm
(6.8˝×6.4˝×0.6˝)
Ordering Information
Part Number Description Material
Z150-0101Shipping box for flat wafer Clear polycarbonate
4ENTEGRIS,INC.

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