专利名称：Method for active wafer centering using a
single sensor
发明人：Robert Martinson,Dhairya
Shrivastava,Matthew Weisactive transport
申请号：US10342550
申请日：20030115
公开号：US06760976B1
公开日：
20040713
专利内容由知识产权出版社提供
专利附图：
摘要：A method for a robotic semiconductor wafer processing system to correct for wafers that have become offset or off-center during wafer processing. This is
accomplished by determining the amount of offset and re-centering the wafer during wafer transport to the next process station using a single station sensor to locate the wafer center point. Each single sensor located at each station activates when the wafer's edge traverses through the sensor's path. Directional coordinates for the measured designated points on the wafer's edge are calculated, and the intersection points of two circles, analytically derived from using the measured designated points as their centers, are determined. The intersection point closest to the true wafer center position represents the measured wafer's center point. This point is compared to the true wafer center position, and the wafer is then adjusted for this difference.
申请人：NOVELLUS SYSTEMS, INC.
代理机构：DeLio & Peterson, LLC
代理人：Robert Curcio
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