专利名称：Recipe editor for editing and creating
process recipes with parameter-level
security for various kinds of semiconductor-
manufacturing equipment
editor evaluating revision
发明人：Manoj Betawar,Vrunda Bhagwat,Dinesh
Goradia,Manish Mehta,Nitin Parekh
申请号：US09683569
申请日：20020118
公开号：US06665575B2
公开日：
20031216
专利内容由知识产权出版社提供
专利附图：
摘要：A universal recipe editor for editing of semiconductor-manufacturing recipes. The universal recipe editor can read recipes from a wide variety of semiconductor-manufacturing machines from different manufacturers using recipe distributed object model (R-DOM) files. An R-DOM file is generated for each kind of recipe-file format to locate process parameters within proprietary recipe-file formats. The sequence of parameters in the R-DOM file matches the sequence in the recipe data file so that parameter may be mapped from recipe data files for display and editing. ASCII or binary recipe file formats are mapped from the recipe data file using R-DOM objects. Revision and authorng information is kept in a recipe information file for each recipe.
申请人：FABCENTRIC, INC.
代理机构：Sierra Patent Group, Ltd.
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