专利名称：Method for producing a layer on a substrate
发明人：Patrick Kluth,Quing-Tai Zhao,Siegfried Mantl
申请号：US10496850
申请日：20021116
公开号：US20050042870A1
公开日：
reaction diffusion
20050224
专利内容由知识产权出版社提供
专利附图：
摘要：The invention relates to a method for the production of structures in the
nanometer range from larger, existing structures An elastic strain field in generated in an already structured layer and optionally in a substrate. A strain-dependent diffusion and reaction process subsequently takes place, wherein the existing structure can be reduced
in a reproducible manner by means of material transport.
申请人：Patrick Kluth,Quing-Tai Zhao,Siegfried Mantl 地址：Dusseldorf DE,Julich DE,Julich DE
国籍：DE,DE,DE
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