专利名称：Metal halide reactor for CVD and method
发明人：Hubert Patrovsky
申请号：US11717244
申请日：20070314
公开号：US20080226821A1
公开日：
20080918
专利内容由知识产权出版社提供
专利附图：
摘要：A reaction vessel (reactor) is shown that, filled with metal and placed either within a CVD type furnace or in a housing in fluid communication with the CVD type furnace can produce commercial quantities of a metal halide gas over extended time periods and multiple furnace runs. The control of temperature and the simplicity of this
reaction vessel allows temperature differentials between the metal halide gas produced and the CVD type reactor target thus providing differing deposits. The reactor is noteworthy in that no valves, flow restrictors or other equipment which could create corrosion problems is used in the heated/reactive area of the vessel thus producing very high quality metal halide gas.
申请人：Hubert Patrovsky
reactive metal地址：St. Eustache CA
国籍：CA
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