专利名称：PRE-METAL DIELECTRIC RAPID THERMAL PROCESSING FOR SUB-MICRON
TECHNOLOGY
发明人：DAS, John
申请号：EP00953405.8
申请日：20000901
公开号：EP1212798A2
公开日：
reactive metal
20020612
专利内容由知识产权出版社提供
摘要：In sequence with the silicate glass that flows back with low heat budget, it includes steam inlet combination and reactive gasoline that atmosphere, which is included in RTP system,
申请人：Steag RTP Systems, Inc.
地址：4425 Fortran Drive San Jose, CA 95134-2300 US
国籍：US
代理机构：Wagner & Geyer
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