专利名称：Metal MEMS devices and methods of
making same
发明人：Noel C. MacDonald,Marco F. Aimi
申请号：US11625758
申请日：20070122
公开号：US07569411B2
公开日：
20090804
专利内容由知识产权出版社提供
专利附图：
摘要：Metal MEMS structures are fabricated from metal substrates, preferably
titanium, utilizing micromachining processes with a new deep etching procedure to provide released microelectromechanical devices. The deep etch procedure includes
metal anisotropic reactive ion etching utilizing repetitive alternating steps of etching and side wall protection. Variations in the timing of the etching and protecting steps
produces walls of different roughness and taper. The metal wafers can be macomachined before forming the MEMS structures, and the resulting wafers can be stacked and bonded in packages.
申请人：Noel C. MacDonald,Marco F. Aimi
地址：Santa Barbara CA US,Goleta CA US
国籍：US,US
reactive metal代理机构：Gates & Cooper LLP 更多信息请下载全文后查看

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