专利名称：Apparatus and process for sampling reactive
fluorine-containing gases
发明人：Cowles, Dan,Uchida, Naoko
申请号：EP99401168.2
申请日：19990512
reactive metal
公开号：EP0957351A2
公开日：
19991117
专利内容由知识产权出版社提供
专利附图：
摘要：Provided is an apparatus and process for sampling reactive fluorine-containing gases in which there is little sample contamination and little timewise change in the sample. The sampling apparatus comprises a cylinder for the recovery of samples of
reactive fluorine-containing gases. A feed conduit is connected to the inlet of the cylinder by an inlet valve. The feed conduit has a feed inlet that is provided with a feed valve. A discharge conduit is connected to the outlet from the cylinder by an outlet valve. The discharge conduit has a discharge outlet that is provided with a discharge valve. A bypass conduit is connected in parallel to the cylinder, and the upstream and downstream ends of the conduit are provided, respectively, with a bypass inlet valve and a bypass outlet valve. The inlet valve and bypass inlet valve comprise a block valve that minimizes dead space. The interior surfaces of the cylinder and feed conduit comprise metal surfaces inert to fluorine.
申请人：L'AIR LIQUIDE, SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GEORGES CLAUDE
地址：75, Quai d'Orsay 75321 Paris Cédex 07 FR
国籍：FR
代理机构：Vesin, Jacques
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