专利名称：Nitride removal method
发明人：James H. Knapp,George F. Carney,Francis J.
Carney
申请号：US07/327630
申请日：19890323
公开号：US04877482A
公开日：
19891031
专利内容由知识产权出版社提供
摘要：A method for removing nitride coatings from metal tooling and mold surfaces without damaging the underlying base metal includes placing the nitride coated metal surface into a plasma reactor and subjecting it to a gaseous plasma comprising a reactive fluorine species. The reactive fluorine species may be derived from one or more of many well known gases. An optional step of cleaning the nitride coating is recommended.
申请人：MOTOROLA INC.
代理人：Harry Wolin
reactive metal
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