专利名称：TRISILYLAMINE PREPARATION APPARATUS AND PREPARATION METHOD
发明人：LEE, Yoonsik,이윤식,KIM, Soojin,김수진,KWON, Sambong,권삼봉,PARK, Jaeseong,박재성,KIM,
Taesoon,김태순
申请号：KR2021/009728
申请日：20210727
公开号：WO2022/039401A1
公开日：
20220224
专利内容由知识产权出版社提供
reactor4
专利附图：
摘要：A trisilylamine preparation apparatus of the present invention comprises: a
reactor in which a trisilylamine synthesis reaction occurs; a reactant supply pipe for supplying reactants to the reactor; a trisilylamine discharge pipe for discharging trisilylamine from the reactor; a reactor heating means for heating the reaction space of the reactor; and a gaseous by-product discharge pipe for discharging a gaseous by-product from the reactor, wherein the reaction space of the reactor is maintained at a temperature that is lower than the decomposition temperature of a reaction by-product generated during the synthesis reaction, the reactor heating means heats the reaction space of the reactor to a temperature that is higher than or equal to the decomposition temperature after trisilylamine is discharged through the trisilylamine discharge pipe, and the gaseous by-product discharge pipe discharges a gaseous by-product comprising a pyrolysate of the reaction by-product, generated through pyrolysis by means of the reactor heating means.
申请人：SKMATERIALSCO.,LTD.,에스케이머티리얼즈주식회사
地址：59-33 Gaheunggongdan-ro Yeongju-si Gyeongsangbuk-do 36059,36059 경상북도영주시가흥공단로 59-33, Gyeongsangbuk-do
国籍：KR,KR
代理人：LEE, Kwang-Jik et al.,이광직
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