专利名称:Infrared ray ime - the hot observation reactor null by ji
发明人:ICHIHASHI MASAHIKO,市橋 正彦
申请号:JP特願昭62-321523
申请日:19871221
公开号:JP第2519765号B2
公开日:
19960731
专利内容由知识产权出版社提供
摘要:PURPOSE: To ensure sufficient observation in vacuum even at a temperature of 1100 deg.C or above by locating a transparent partitioning quartz plate at a position of low infrared density in a light source room and providing an observation window at a furnace part where the optical axis of the objective lens of a microscope passes. CONSTITUTION: An observation window 6 is fixed at a part of a furnace chamber 2 where the optical axis of the objective lens 8 of a microscope passes and a gas introduction port 15 provided on the outside of the furnace body 1 communicates with a passage 13. A sample holder 12 is inserted through the passage 13 into a heating chamber 2b and a sample 16 is set at a specified position. The heating chamber 2b is evacuated through an evacuation passage 14 and introduced with a required gas through the port 15 and the passage 13. When infrared rays are emitted from a ring- like light source 10 disposed in a light source chamber 2d, a part of the infrared rays passes through a partitioning quartz plate 11 and impinges directly on the sample 16 in the chamber 2b and the remainder reflects on the inner wall of a light source chamber 2a and the chamber 2b toward the sample 16 which is thereby heated up quickly to a desired temperature from the entire surface. Vacuum atmosphere is thereby produced at 1100 deg.C or above and a high
resolution image can be observed.
申请人:SHINKU RIKO KK,真空理工株式会社地址:神奈川県横浜市緑区白山町300番地
国籍:JP
代理人:八木田 茂 (外3名)
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