专利名称:EDGE COATING IN CONTINUOUS DEPOSITION LINE
发明人:SCHUISKY, Mikael
申请号:EP07716098.4
申请日:20070302
公开号:EP1999293A1
deposition公开日:
20081210
专利内容由知识产权出版社提供
摘要:A continuous roll-to-roll deposition coating apparatus and a method to continuous coat an edge of a strip substrate are disclosed. The invention is aimed at accomplishing a hard and abrasion resistant coated metal strip with improved adhesion between a dense coating and the substrate.The deposition coating apparatus, comprises: a vacuum process chamber (114) including an etching zone (116) upstream of a deposition zone (118);at least one ion assisted etcher(120) in the etching zone; and at least one deposition apparatus (122) in the deposition zone,wherein the at least one deposition apparatus includes at least one target (124), wherein the strip substrate, in travelling through the vacuum process chamber, projects a first edge region (140) toward the at least one ion assisted etcher in the etching zone and projects the first edge region toward the target of the at least one deposition apparatus in the deposition zone, wherein the first edge region of the strip substrate includes at least a first angled surface (142) tapered from a first proximal position (144) toward a first distal position, the first proximal position closer to a centre region of the strip substrate than the first distal position, the first angled surface having a first surface normal (150), and wherein the target of the at least one deposition apparatus includes a target surface (126) having a
target normal(128) and is angled with respect to the first angled surface so that the target normal inte
rsects the first surface normal at an angle α, where α is greater than or equal to 90 degrees.
申请人:Sandvik Intellectual Property AB
地址:81181 Sandviken SE
国籍:SE
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