氮化物
...添加对磁控溅射技术制备的氮化钛薄膜的形态和性能的影响
锗的添加对磁控溅射技术制备的氮化钛薄膜的形态和性能的影响Abstract: Thin films of TM– X– N (TM stands for early transition metal and X = Si, Al, etc.) are used as protective coatings. The most investigated among the ternary compos...
锗的添加对磁控溅射技术制备的氮化钛薄膜的形态和性能的影响_百度文 ...
锗的添加对磁控溅射技术制备的氮化钛薄膜的形态和性能的影响Abstract: Thin films of TM– X– N (TM stands for early transition metal and X = Si, Al, etc.) are used as protective coatings. The most investigated among the ternary compos...
